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Sensor fusion for micro positioning (2012)

Kuhfuß, B.; Schenck, C.; Hellwig, C.; Wilhelmi, P.:

7th International Conference on MicroManufacturing (ICOMM 2012), March 12-14, 2012, Norris University Center, Northwestern University, Evanston IL, USA

Abstract

Process chains for the manufacturing of micro formed parts are considered in current investigations. Due to scaling effects, a difficulty in the manufacturing process is the handling of the micro parts. Therefore the approach to keep the single parts interconnected in linked parts is purposed. Assuming higher process variances in micro-manufacturing every single part in these linked parts has to be referenced to the machining devices separately. Due to the fragility of micro- parts non-tactile optical sensors are preferred for part detection. To increase the resolution of the sensor a sensor- fusion with the position measurement system of the feed drive is studied. Therefore the signals are processed and different algorithms are developed and compared to enable a fast in-time extraction of geometrical features. These methods are evaluated regarding their deviation to a reference measurement done by microscopy. According to the resolution in feed direction of the laser-light barrier, given by the width of the laser-light curtain, the accuracy is increased about ten times.