10th International euspen Conference, May 31st-June 4th, 2010, Delft/Niederlande
A huge variety of micro-sized sensors and actuators are created using methods of Micro Systems Technology (MST). The limitation of this technology is the use of stacked layers so that no real 3D-structures can be created. This barrier can be overcome by combining MST-processes with subsequent forming-processes to transform the flat structures into 3D objects. This is demonstrated in this paper with the forming of a planar coil arrangement into a cylindrical micro motor. This work has been realized in close cooperation with the application center embedded microsystems Bremen (emb).